关键词: 芯片制备, 职业病危害预评价, 防护措施, 关键控制岗位, 急性事故

Abstract: Objective To analyze and evaluate the chip preparation process of electronic enterprise in Xi'an City,put forward key posts and prevention and control measures through the prediction of occupational disease hazards,and implement them in the feasibility study stage of the project,so as to better protect the occupational health of workers. Methods The principle of combining checklist,analogy and engineering analysis was used to identify and analyze the occupational hazard factors generated during chip preparation,and the proposed occupational disease prevention measures were analyzed and evaluated in combination with the operation mode and expected exposure level of personnel. Results Except that the concentrations of workers exposed to sulfuric acid and hydrogen peroxide in the cleaning area were lower than the occupational exposure limits,the concentrations of other workers exposed to toxic substances were lower than the occupational exposure limit of 10%,the equivalent sound level intensity of 8 hours of exposure to noise was <80 dB（A）,and the intensities of exposure to non ionizing radiation and ionizing radiation were far lower than the occupational exposure limits. Conclusion The chip preparation process equipment has high automation,good airtightness and normal production process,the concentration of occupational hazard factors exposed to operators is low,but the chemical factors are complex,involving highly toxic,acid and alkali substances,and there are risks of acute poisoning and chemical burns,so it is necessary to focused on the emergency rescue measures and emergency facilities in case of acute accidents,and improve the prevention and protection.

Key words: Chip preparation, Pre-assessment of occupational disease hazards, Protective measures, Key control posts, Acute accidents