关键词: 高效单晶硅, 隧穿氧化层钝化接触, 化学有害因素, 半定量风险评估, 职业健康

Abstract: Objective To evaluate theoccupational health risk caused by chemical harmful factors in a high-efficiency monocrystalline battery project in Taiyuan City,provide technical basis for occupational health risk management of the project. Methods From May to July 2021,the occupational health investigation was performed on a high-efficiency monocrystalline battery project in Taiyuan City. The engineering analysis method was used to identify the chemical hazardous factors. The risk assessment was carried out by suing the semi-quantitative risk assessment method recommended in the Technical guidelines for occupational health risk assessment of chemical harmful factors in the workplace（GBZ/T 298-2017）. Results There were two high risk posts（level 4）,which were the ammonia post（ammonia） and phosphorane post（phosphine） in the storage and transportation system. There were13medium risk posts（level 3）,which were hydrofluoric acid post（hydrogen fluoride）,sodium hydroxide post（sodium hydroxide）,hydrochloric acid post（chlorhydricacid）,special gas post（borontrifluorideand phosphorus oxychloride）,laughing gas post（nitrous oxide）of the storage and transportation system,making fluff post（sodium hydroxideand hydrogen fluoride）,etching post（hydrogen fluoride）,ion implantation post（phosphine）,annealing post（phosphorus oxychloride）,cleaning post（hydrogen fluoride）,coating post（ammoniaand nitrous oxide） of the battery workshop,and waste gas treatment post（hydrogen fluoride）,coating gas treatment post（ammonia and nitrous oxide） of the auxiliary system. There were six low risk posts（level 2）,which were hydrogen peroxide post（hydrogenperoxide）,silane post（silicontetrahydride）,comprehensive post（conductive paste） of the storage and transportation system,boron diffusion post（boron trifluoride）,metallization post（conductive paste）of the battery workshop,and waste water treatment post（fluoridesand compounds） of auxiliary system. Conclusion The chemical harmful factors existing in the production process of the project may have adverse effects on the physical health of the workers,the attention should be paid to ammonia post and phosphorane post in the storage and transportation system,and corresponding control measures should be taken according to different risk levels in the management.

Key words: High-efficiency monocrystalline, Tunnel oxide passivating contacts, Chemical harmful factors, Semi-quantitative risk assessment, Occupational health